Exploring polysilicon deposition conditions through a laboratory CVD prototype
- Ramos, A.
- del Cañizo, C.
- Valdehita, J.
- Zamorano, J.C.
- Rodríguez, A.
- Luque, A.
ISSN: 1862-6351, 1610-1642
Year of publication: 2012
Volume: 9
Issue: 10-11
Pages: 2164-2168
Type: Article