Exploring polysilicon deposition conditions through a laboratory CVD prototype

  1. Ramos, A.
  2. del Cañizo, C.
  3. Valdehita, J.
  4. Zamorano, J.C.
  5. Rodríguez, A.
  6. Luque, A.
Journal:
Physica Status Solidi (C) Current Topics in Solid State Physics

ISSN: 1862-6351 1610-1642

Year of publication: 2012

Volume: 9

Issue: 10-11

Pages: 2164-2168

Type: Article

DOI: 10.1002/PSSC.201200161 GOOGLE SCHOLAR

Sustainable development goals