High level active n + doping of strained germanium through co-implantation and nanosecond pulsed laser melting

1. Pastor, D.
2. Gandhi, H.H.
3. Monmeyran, C.P.
4. Akey, A.J.
5. Milazzo, R.
6. Cai, Y.
7. Napolitani, E.
8. Gwilliam, R.M.
9. Crowe, I.F.
10. Michel, J.
11. Kimerling, L.C.
12. Agarwal, A.
13. Mazur, E.
14. Aziz, M.J.