Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique

1. Monmeyran, C.
2. Crowe, I.F.
3. Gwilliam, R.M.
4. Heidelberger, C.
5. Napolitani, E.
6. Pastor, D.
7. Gandhi, H.H.
8. Mazur, E.
9. Michel, J.
10. Agarwal, A.M.
11. Kimerling, L.C.