Publicaciones en colaboración con investigadores/as de Instituto de Microelectrónica de Barcelona (8)

2011

  1. DRIE based technology for 3D silicon barcodes fabrication

    Sensors and Actuators, B: Chemical

2010

  1. Pattern transfer optimization for the fabrication of arrays of silicon nanowires

    Microelectronic Engineering, Vol. 87, Núm. 5-8, pp. 1479-1482

2009

  1. DRIE based technology for 3D silicon barcodes fabrication

    Procedia Chemistry

  2. Patterning of ALD HfO2 layers on silicon

    ECS Transactions

  3. Silicon based devices for intracellular applications

    IFMBE Proceedings

  4. Thin high-k dielectric layers deposited by ALD

    Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

2007

  1. DRIE based novel technique for AFM probes fabrication

    Microelectronic Engineering, Vol. 84, Núm. 5-8, pp. 1132-1135

  2. Membrane-suspended microgrid as a gas preconcentrator for chromatographic applications

    Sensors and Actuators, A: Physical, Vol. 135, Núm. 1, pp. 192-196