Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films
- Rezgui, B.
- Sibai, A.
- Nychyporuk, T.
- Lemiti, M.
- Bremond, G.
- Maestre, D.
- Palais, O.
Journal:
Applied Physics Letters
ISSN: 0003-6951
Year of publication: 2010
Volume: 96
Issue: 18
Type: Article