Bonding configuration and density of defects of SiOxH y thin films deposited by the electron cyclotron resonance plasma method
- San Andrés, E.
- Del Prado, A.
- Mártil, I.
- González-Díaz, G.
- Bravo, D.
- López, F.J.
- Fernández, M.
- Bohne, W.
- Röhrich, J.
- Selle, B.
- Sieber, I.
ISSN: 0021-8979
Argitalpen urtea: 2003
Alea: 94
Zenbakia: 12
Orrialdeak: 7462-7469
Mota: Artikulua