Full composition range silicon oxynitride films deposited by ECR-PECVD at room temperature
- Del Prado, A.
- Mártil, I.
- Fernández, M.
- González-Díaz, G.
ISSN: 0040-6090
Year of publication: 1999
Volume: 343-344
Issue: 1-2
Pages: 437-440
Type: Article
Journal:
Thin Solid Films