Nitridation of Si by N2 electron cyclotron resonance plasma and integration with ScOx deposition
- Feijoo, P.C.
- Del Prado, A.
- Toledano-Luque, M.
- San Andŕs, E.
- Lucía, M.L.
Journal:
Journal of the Electrochemical Society
ISSN: 0013-4651
Year of publication: 2010
Volume: 157
Issue: 4
Type: Article