Influence of interlayer trapping and detrapping mechanisms on the electrical characterization of hafnium oxide/silicon nitride stacks on silicon

1. García, H.
2. Dueas, S.
3. Castán, H.
4. Gómez, A.
5. Bailón, L.
6. Toledano-Luque, M.
7. Del Prado, A.
8. Mártil, I.
9. González-Díaz, G.