Conductance Transient Comparative Analysis of Electron-Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposited SiNx, SiC 2/SiNx and SiOxNy Dielectric Films on Silicon Substrates
- Castán, H.
- Dueñas, S.
- Barbolla, J.
- Del Prado, Á.
- San Andrés, E.
- Mártil, I.
- González-Díaz, G.
ISSN: 0021-4922
Year of publication: 2004
Volume: 43
Issue: 1
Pages: 66-70
Type: Article