Conductance transient comparative analysis of ECR-PECVD deposited SiN x, SiO2/SiNx and SiOxNy dielectric films on silicon substrates

  1. Castán, H.
  2. Dueñas, S.
  3. Barbolla, J.
  4. Del Prado, A.
  5. San Andrés, E.
  6. Mártil, I.
  7. González-Díaz, G.
Proceedings:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Year of publication: 2003

Volume: 786

Pages: 83-87

Type: Conference paper