Lattice recovery by rapid thermal annealing in Mg+-implanted InP assessed by Raman spectroscopy

  1. Marcos, B.
  2. Ibáez, J.
  3. Cuscó, R.
  4. Martínez, F.L.
  5. González-Díaz, G.
  6. Artús, L.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2001

Volume: 175-177

Pages: 252-256

Type: Conference paper

DOI: 10.1016/S0168-583X(00)00530-9 GOOGLE SCHOLAR
Data source: Scopus