Characterization of Si implantation and annealing of InP by Raman spectroscopy
- Artus, L.
- Cusco, R.
- Martin, J.M.
- Gonzalez-Diaz, G.
Aktak:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Argitalpen urtea: 1995
Alea: 354
Orrialdeak: 213-217
Mota: Biltzar ekarpena