Electrical and optical characterisation of silicon and silicon/phosphorus implantsin InP doped with iron

  1. Martin, J.M.
  2. García, S.
  3. Martil, I.
  4. González-Díaz, G.
  5. Cuscó, R.
  6. Artús, L.
Journal:
Materials Science and Technology (United Kingdom)

ISSN: 1743-2847,  0267-0836

Year of publication: 1995

Volume: 11

Issue: 11

Pages: 1203-1206

Type: Article

DOI: 10.1179/MST.1995.11.11.1203 GOOGLE SCHOLAR
Data source: Scopus