Sputtering process of Cu2S in an Ar atmosphere

  1. Santamaria, J.
  2. Iborra, E.
  3. Mártil, I.
  4. González-Diaz, G.
  5. Sánchez-Quesada, F.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1987

Volume: 37

Issue: 5-6

Pages: 433-436

Type: Article

DOI: 10.1016/0042-207X(87)90328-9 GOOGLE SCHOLAR
Data source: Scopus