Gadolinium scandate by high-pressure sputtering for future generations of high-κ dielectrics

  1. Feijoo, P.C.
  2. Pampillón, M.A.
  3. San Andrés, E.
  4. Fierro, J.L.G.
Revue:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Année de publication: 2013

Volumen: 28

Número: 8

Type: Article

DOI: 10.1088/0268-1242/28/8/085004 GOOGLE SCHOLAR
La source de données: Scopus