Line width dependent mobility in high-k - A comparative performance study between FUSI and TiN

  1. Pantisano, L.
  2. Trojman, L.
  3. Severi, S.
  4. San Andres, E.
  5. Kerner, C.
  6. Veloso, A.
  7. Ferain, I.
  8. Hoffman, T.
  9. Groeseneken, G.
  10. De Gendt, S.
Aktak:
International Symposium on VLSI Technology, Systems, and Applications, Proceedings

ISBN: 9781424405855

Argitalpen urtea: 2007

Mota: Biltzar ekarpena

DOI: 10.1109/VTSA.2007.378909 GOOGLE SCHOLAR
Datuen iturria: Scopus