Nanopatterning of silicon surfaces by low-energy ion-beam sputtering: Dependence on the angle of ion incidence

  1. Gago, R.
  2. Vázquez, L.
  3. Cuerno, R.
  4. Varela, M.
  5. Ballesteros, C.
  6. Albella, J.M.
Journal:
Nanotechnology

ISSN: 0957-4484

Year of publication: 2002

Volume: 13

Issue: 3

Pages: 304-308

Type: Conference paper

DOI: 10.1088/0957-4484/13/3/313 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus