Production of ordered silicon nanocrystals by low-energy ion sputtering

  1. Gago, R.
  2. Vázquez, L.
  3. Cuerno, R.
  4. Varela, M.
  5. Ballesteros, C.
  6. Albella, J.M.
Revue:
Applied Physics Letters

ISSN: 0003-6951

Année de publication: 2001

Volumen: 78

Número: 21

Pages: 3316-3318

Type: Article

DOI: 10.1063/1.1372358 GOOGLE SCHOLAR