Micromachined silicon lenses for terahertz applications
- Bueno, J.
- López-Camacho, E.
- Silva-López, M.
- Rico-García, J.M.
- Llombart, N.
- Alda, J.
- Costa-Krämer, J.L.
Journal:
Infrared Physics and Technology
ISSN: 1350-4495
Year of publication: 2013
Volume: 61
Pages: 144-148
Type: Article