Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology

  1. Iriarte, G.F.
  2. Rodríguez, J.G.
  3. Ro, R.
  4. Lee, R.
  5. Williams, O.A.
  6. Araujo, D.
  7. Villar, M.P.
  8. Calle, F.
Proceedings:
IEEE International Ultrasonics Symposium, IUS

ISSN: 1948-5719,  1948-5727

ISBN: 9781457712531

Year of publication: 2011

Pages: 573-576

Type: Conference paper

DOI: 10.1109/ULTSYM.2011.0138 GOOGLE SCHOLAR
Data source: Scopus