Heat losses in a CVD reactor for polysilicon production: Comprehensive model and experimental validation

  1. Ramos, A.
  2. Rodríguez, A.
  3. Del Cañizo, C.
  4. Valdehita, J.
  5. Zamorano, J.C.
  6. Luque, A.
Journal:
Journal of Crystal Growth

ISSN: 0022-0248

Year of publication: 2014

Volume: 402

Pages: 138-146

Type: Article

DOI: 10.1016/J.JCRYSGRO.2014.05.020 GOOGLE SCHOLAR

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