Heat losses in a CVD reactor for polysilicon production: Comprehensive model and experimental validation
- Ramos, A.
- Rodríguez, A.
- Del Cañizo, C.
- Valdehita, J.
- Zamorano, J.C.
- Luque, A.
Journal:
Journal of Crystal Growth
ISSN: 0022-0248
Year of publication: 2014
Volume: 402
Pages: 138-146
Type: Article