Low-to-Mid Al Content (x = 0–0.56) AlxIn1−xN Layers Deposited on Si(100) by Radio-Frequency Sputtering

1. Blasco, R.
2. Valdueza-Felip, S.
3. Montero, D.
4. Sun, M.
5. Olea, J.
6. Naranjo, F.B.