Compositional gradients at the nanoscale in substoichiometric thin films deposited by magnetron sputtering at oblique angles: A case study on SiOx thin films
- Garcia-Valenzuela, A.
- Alcaide, A.M.
- Rico, V.
- Ferrer, F.J.
- Alcala, G.
- Rojas, T.C.
- Alvarez, R.
- Gonzalez-Elipe, A.R.
- Palmero, A.
ISSN: 1612-8869, 1612-8850
Ano de publicación: 2022
Volume: 19
Número: 1
Tipo: Artigo