Nanomagnet fabrication on FBAR for magnetic sensor applications

  1. Campanella, H.
  2. Llobet, J.
  3. Duch, M.
  4. Esteve, J.
  5. Plaza, J.A.
  6. Del Real, R.P.
  7. Díaz-Michelena, M.
  8. Guerrero, H.
Proceedings:
Proceedings - IEEE Ultrasonics Symposium

ISSN: 1051-0117

ISBN: 9781424443895

Year of publication: 2009

Pages: 2166-2169

Type: Conference paper

DOI: 10.1109/ULTSYM.2009.5441750 GOOGLE SCHOLAR
Data source: Scopus