Nitridation of Si by N[sub 2] Electron Cyclotron Resonance Plasma and Integration with ScO[sub x] Deposition
- Feijoo, P. C.
- Prado Millán, Álvaro del 1
- Toledano-Luque, M.
- San Andrés Serrano, Enrique 1
- Lucía Mulas, María Luisa 1
-
1
Universidad Complutense de Madrid
info
ISSN: 0013-4651, 1945-7111
Datum der Publikation: 2010
Ausgabe: 157
Nummer: 4
Art: Artikel
Andere Publikationen in: Journal of The Electrochemical Society
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