Ti supersaturated Si by microwave annealing processes

  1. Olea, J.
  2. González-Díaz, G.
  3. Pastor, D.
  4. García-Hemme, E.
  5. Caudevilla, D.
  6. Algaidy, S.
  7. Pérez-Zenteno, F.
  8. Duarte-Cano, S.
  9. García-Hernansanz, R.
  10. del Prado, A.
  11. Andrés, E.S.
  12. Mártil, I.
  13. Lee, Y.-J.
  14. Hong, T.-C.
  15. Chao, T.-S.
Journal:
Semiconductor Science and Technology

ISSN: 1361-6641 0268-1242

Year of publication: 2023

Volume: 38

Issue: 2

Type: Article

DOI: 10.1088/1361-6641/ACAC4A GOOGLE SCHOLAR lock_openDocta Complutense editor

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