Modification of Oxide Thin Films with Low-Energy Ion Bombardment
Buch:
MODERN TECHNOLOGIES FOR CREATING THE THIN-FILM SYSTEMS AND COATINGS
- Nikitenkov, NN (coord.)
ISBN: 978-953-51-3004-8, 978-953-51-3003-1
Datum der Publikation: 2017
Seiten: 21-41
Art: Buch-Kapitel