Plasma oxidation of metallic gadolinium deposited on silicon by high pressure sputtering as high permittivity dielectric

  1. Pampillon, M. A.
  2. Feijoo, P. C.
  3. Andres, E. San
  4. Fierro, J. L. G.
Book Series:
PROCEEDINGS OF THE 2013 SPANISH CONFERENCE ON ELECTRON DEVICES (CDE 2013)
  1. Garcia, H (coord.)
  2. Castan, H (coord.)

ISSN: 2163-4971

ISBN: 978-1-4673-4668-9,  978-1-4673-4784-6

Year of publication: 2013

Pages: 5-8

Congress: 9th Spanish Conference on Electron Devices (CDE)

Type: Conference paper

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Data source: WoS