Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures

  1. Schmidt, R.
  2. Mayrhofer, P.
  3. Schmid, U.
  4. Bittner, A.
Journal:
Journal of Applied Physics

ISSN: 1089-7550,  0021-8979

Year of publication: 2019

Volume: 125

Issue: 8

Type: Article

DOI: 10.1063/1.5050181 GOOGLE SCHOLAR
Data source: Scopus