Nanoscale pattern formation on surfaces by cluster ion beam irradiation

  1. Jiménez-Sáez, J.C.
  2. Muñoz, S.
  3. Palacios, P.
Journal:
Physica Scripta

ISSN: 1402-4896 0031-8949

Year of publication: 2024

Volume: 99

Issue: 8

Type: Article

DOI: 10.1088/1402-4896/AD63DE GOOGLE SCHOLAR