Thin high-k dielectric layers deposited by ALD
- Campabadal, F.
- Zabala, M.
- Rafi, J.M.
- Acero, M.C.
- Sánchez, A.
- Sánchez, J.
- Sánchez, S.
- Andreu, R.
Proceedings:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
ISBN: 9781424428397
Year of publication: 2009
Pages: 27-30
Type: Conference paper