Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors
- Cabañas, A.
- Blackburn, J.M.
- Watkins, J.J.
ISSN: 0167-9317
Year of publication: 2002
Volume: 64
Issue: 1-4
Pages: 53-61
Type: Conference paper
Journal:
Microelectronic Engineering