Reactive deposition of device quality conformal copper films from supercritical CO2
- Blackburn, J.M.
- Cabanas, A.
- Zong, Y.
- Quinn, J.D.
- Watkins, J.J.
Proceedings:
Advanced Metallization Conference (AMC)
ISSN: 1048-0854
Year of publication: 2001
Pages: 177-183
Type: Conference paper