Surface modifications in amorphous carbon films exposed to nitrogen plasma

  1. Freire Jr., F.L.
  2. Castañeda, S.I.
  3. Prioli, R.
Journal:
Diamond and Related Materials

ISSN: 0925-9635

Year of publication: 2007

Volume: 16

Issue: 4-7 SPEC. ISS.

Pages: 1282-1285

Type: Article

DOI: 10.1016/J.DIAMOND.2006.11.026 GOOGLE SCHOLAR
Data source: Scopus