Effects of air exposure on ion beam assisted TiN:O coatings to prevent multipactor

  1. Castañeda, S.I.
  2. Díaz, N.
  3. Raboso, D.
  4. Montero, I.
  5. Galán, L.
  6. Rueda, F.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Year of publication: 2003

Volume: 21

Issue: 6

Pages: 2007-2012

Type: Article

DOI: 10.1116/1.1621403 GOOGLE SCHOLAR
Data source: Scopus