Oxygen to silicon ratio determination of SiOxHy thin films
- Andrés, E.S.
- Del Prado, A.
- Mártil, I.
- González-Díaz, G.
- Bohne, W.
- Röhrich, J.
- Selle, B.
- Sieber, I.
- Fernández, M.
ISSN: 0040-6090
Year of publication: 2005
Volume: 492
Issue: 1-2
Pages: 232-235
Type: Article