Deposition of low temperature Si-based insulators by the electron cyclotron resonance plasma method

  1. Garcia, S.
  2. Martin, J.M.
  3. Martil, I.
  4. Fernandez, M.
  5. Gonzalez-Diaz, G.
Aldizkaria:
Thin Solid Films

ISSN: 0040-6090

Argitalpen urtea: 1998

Alea: 317

Zenbakia: 1-2

Orrialdeak: 116-119

Mota: Artikulua

DOI: 10.1016/S0040-6090(97)00510-5 GOOGLE SCHOLAR
Datuen iturria: Scopus