Deposition of low temperature Si-based insulators by the electron cyclotron resonance plasma method
- Garcia, S.
- Martin, J.M.
- Martil, I.
- Fernandez, M.
- Gonzalez-Diaz, G.
ISSN: 0040-6090
Année de publication: 1998
Volumen: 317
Número: 1-2
Pages: 116-119
Type: Article