Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures
- Garcia, S.
- Martil, I.
- Gonzalez Diaz, G.
- Castan, E.
- Dueñas, S.
- Fernandez, M.
ISSN: 0021-8979
Year of publication: 1998
Volume: 83
Issue: 1
Pages: 332-338
Type: Article