Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures

  1. Garcia, S.
  2. Martil, I.
  3. Gonzalez Diaz, G.
  4. Castan, E.
  5. Dueñas, S.
  6. Fernandez, M.
Revue:
Journal of Applied Physics

ISSN: 0021-8979

Année de publication: 1998

Volumen: 83

Número: 1

Pages: 332-338

Type: Article

DOI: 10.1063/1.366713 GOOGLE SCHOLAR
La source de données: Scopus