Concurrent segregation and erosion effects in medium-energy iron beam patterning of silicon surfaces
- Redondo-Cubero, A.
- Lorenz, K.
- Palomares, F.J.
- Muñoz, A.
- Castro, M.
- Muñoz-García, J.
- Cuerno, R.
- Vázquez, L.
ISSN: 1361-648X, 0953-8984
Year of publication: 2018
Volume: 30
Issue: 27
Type: Article