Self-organised silicide nanodot patterning by medium-energy ion beam sputtering of Si(100): Local correlation between the morphology and metal content

  1. Redondo-Cubero, A.
  2. Galiana, B.
  3. Lorenz, K.
  4. Palomares, F.
  5. Bahena, D.
  6. Ballesteros, C.
  7. Hernandez-Calderón, I.
  8. Vázquez, L.
Revista:
Nanotechnology

ISSN: 1361-6528,  0957-4484

Any de publicació: 2016

Volum: 27

Número: 44

Tipus: Article

DOI: 10.1088/0957-4484/27/44/444001 GOOGLE SCHOLAR
Font de les dades: Scopus