Self-organised silicide nanodot patterning by medium-energy ion beam sputtering of Si(100): Local correlation between the morphology and metal content
- Redondo-Cubero, A.
- Galiana, B.
- Lorenz, K.
- Palomares, F.
- Bahena, D.
- Ballesteros, C.
- Hernandez-Calderón, I.
- Vázquez, L.
ISSN: 1361-6528, 0957-4484
Year of publication: 2016
Volume: 27
Issue: 44
Type: Article