Self-organized nanopatterning of silicon surfaces by ion beam sputtering
- Muñoz-García, J.
- Vázquez, L.
- Castro, M.
- Gago, R.
- Redondo-Cubero, A.
- Moreno-Barrado, A.
- Cuerno, R.
Journal:
Materials Science and Engineering R: Reports
ISSN: 0927-796X
Year of publication: 2014
Volume: 86
Pages: 1-44
Type: Review