Pyramid-like nanostructures created by Si homoepitaxy on Si(0 0 1)

  1. Galiana, N.
  2. Martin, P.P.
  3. Munuera, C.
  4. Varela, M.
  5. Ocal, C.
  6. Alonso, M.
  7. Ruiz, A.
Journal:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Year of publication: 2009

Volume: 12

Issue: 1-2

Pages: 52-56

Type: Article

DOI: 10.1016/J.MSSP.2009.07.016 GOOGLE SCHOLAR
Data source: Scopus