Development of a data acquisition and control system for thin film deposition equipment and its application to metals-MBE
- Martín, P.P.
- Alonso, C.E.
- Domingo, I.
- Ruiz, A.
ISSN: 0042-207X
Year of publication: 2002
Volume: 64
Issue: 3-4
Pages: 373-379
Type: Article