High pressure sputtering for kigh-k dielectric deposition. Is it worth trying?

  1. San Andrés, E.
  2. Feijoo, P.C.
  3. Pampillón, M.A.
  4. Lucía, M.L.
  5. Del Prado, A.
Proceedings:
ECS Transactions

ISSN: 1938-6737,  1938-5862

Year of publication: 2014

Volume: 61

Issue: 2

Pages: 27-39

Type: Conference paper

DOI: 10.1149/06102.0027ECST GOOGLE SCHOLAR
Data source: Scopus