Visible and UV Raman scattering study of lattice recovery on Ti implanted silicon layers

  1. Pastor, D.
  2. Olea, J.
  3. Del Prado, A.
  4. García-Hemme, E.
  5. Mártil, I.
  6. González-Díaz, G.
  7. Ibáñez, J.
  8. Cuscó, R.
  9. Artús, L.
Konferenzberichte:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011

ISBN: 9781424478637

Datum der Publikation: 2011

Art: Konferenz-Beitrag

DOI: 10.1109/SCED.2011.5744151 GOOGLE SCHOLAR
Datenquelle: Scopus