Visible and UV Raman scattering study of lattice recovery on Ti implanted silicon layers
- Pastor, D.
- Olea, J.
- Del Prado, A.
- García-Hemme, E.
- Mártil, I.
- González-Díaz, G.
- Ibáñez, J.
- Cuscó, R.
- Artús, L.
Actes de conférence:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
ISBN: 9781424478637
Année de publication: 2011
Type: Communication dans un congrès